Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6795162 | Method for exposing a peripheral area of a wafer and apparatus for performing the same | Dong-Wha Shin, Byung Ho Min, Jae Hong Choi | 2004-09-21 |
| 6720533 | Heater assembly for heating a wafer | Gyeong-Su Keum, Chung-Hun Park, Eun-Seok Song, Jae Han Park | 2004-04-13 |
| 6705020 | Method of and apparatus for use in orienting an object at a reference angle | Gyeong-Su Keum, Yun-Sik Yang, Gum-Chan An, Hae-Keun Youn, Byoung-Sik Jung +1 more | 2004-03-16 |