Issued Patents 2004
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833049 | Apparatus for controlling the temperature of a gas distribution plate in a process reactor | Guy T. Blalock | 2004-12-21 |
| 6812154 | Plasma etching methods | David S. Becker, Bradley J. Howard | 2004-11-02 |
| 6784111 | Etching methods and apparatus and substrate assemblies produced therewith | Rich Stocks | 2004-08-31 |
| 6784108 | Gas pulsing for etch profile control | David S. Becker | 2004-08-31 |
| 6759330 | Method of providing a structure using self-aligned features | Dinesh Chopra, Cem Basceri | 2004-07-06 |
| 6739360 | Liner for use in processing chamber | — | 2004-05-25 |
| 6719873 | Method and apparatus for preventing plasma formation | — | 2004-04-13 |
| 6716769 | Use of a plasma source to form a layer during the formation of a semiconductor device | Thomas A. Figura, Thomas J. Dunbar | 2004-04-06 |
| 6716758 | Aspect ratio controlled etch selectivity using time modulated DC bias voltage | Mirzafer Abatchev, Robert Veltrop | 2004-04-06 |
| 6703690 | Apparatus for reducing isolation stress in integrated circuits | Randhir P. S. Thakur, Zhiqiang Wu, Alan R. Reinberg | 2004-03-09 |
| 6680255 | Plasma etching methods | Richard L. Stocks | 2004-01-20 |