Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6716758 | Aspect ratio controlled etch selectivity using time modulated DC bias voltage | Kevin G. Donohoe, Mirzafer Abatchev | 2004-04-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6716758 | Aspect ratio controlled etch selectivity using time modulated DC bias voltage | Kevin G. Donohoe, Mirzafer Abatchev | 2004-04-06 |