Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812154 | Plasma etching methods | David S. Becker, Kevin G. Donohoe | 2004-11-02 |
| 6753264 | Method of controlling striations and CD loss in contact oxide etch | Li Li | 2004-06-22 |
| 6730609 | Etch aided by electrically shorting upper and lower sidewall portions during the formation of a semiconductor device | Dinesh Chopra | 2004-05-04 |
| 6716763 | Method of controlling striations and CD loss in contact oxide etch | Li Li | 2004-04-06 |