Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835666 | Method for fabricating a mask for semiconductor structures | — | 2004-12-28 |
| 6825079 | Method for producing a horizontal insulation layer on a conductive material in a trench | — | 2004-11-30 |
| 6821863 | Method for producing a cavity in a monocrystalline silicon substrate and a semiconductor component having a cavity in a monocrystalline silicon substrate with an epitaxial covering layer | Dietmar Temmler, Kristin Schupke, Uwe Schilling, Kerstin Pomplun | 2004-11-23 |
| 6740595 | Etch process for recessing polysilicon in trench structures | Stephan Kudelka, Helmut Tews, Alexander Michaelis, Uwe Schroeder, Kristin Schupke +1 more | 2004-05-25 |