Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6767682 | Method for producing quadratic contact holes utilizing side lobe formation | — | 2004-07-27 |
| 6740555 | Semiconductor structures and manufacturing methods | Helmut Tews, Alexander Michaelis, Stephan Kudelka, Raj Jammy, Ulrike Gruening | 2004-05-25 |
| 6740595 | Etch process for recessing polysilicon in trench structures | Stephan Kudelka, Helmut Tews, Alexander Michaelis, Martin Popp, Kristin Schupke +1 more | 2004-05-25 |