Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821863 | Method for producing a cavity in a monocrystalline silicon substrate and a semiconductor component having a cavity in a monocrystalline silicon substrate with an epitaxial covering layer | Martin Popp, Dietmar Temmler, Uwe Schilling, Kerstin Pomplun | 2004-11-23 |
| 6740595 | Etch process for recessing polysilicon in trench structures | Stephan Kudelka, Helmut Tews, Alexander Michaelis, Uwe Schroeder, Martin Popp +1 more | 2004-05-25 |
| 6734077 | Method for fabricating a trench capacitor for a semiconductor memory | Matthias Forster, Anja Morgenschweis, Anett Moll, Jens-Uwe Sachse | 2004-05-11 |