Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821863 | Method for producing a cavity in a monocrystalline silicon substrate and a semiconductor component having a cavity in a monocrystalline silicon substrate with an epitaxial covering layer | Martin Popp, Dietmar Temmler, Kristin Schupke, Kerstin Pomplun | 2004-11-23 |
| 6716678 | Method for producing an antifuse and antifuse for the selective electrical connection of adjacent conductive regions | Matthias Lehr, Veronika Polei, Irene Sperl | 2004-04-06 |