Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6740555 | Semiconductor structures and manufacturing methods | Helmut Tews, Alexander Michaelis, Uwe Schroeder, Raj Jammy, Ulrike Gruening | 2004-05-25 |
| 6740595 | Etch process for recessing polysilicon in trench structures | Helmut Tews, Alexander Michaelis, Uwe Schroeder, Martin Popp, Kristin Schupke +1 more | 2004-05-25 |
| 6677197 | High aspect ratio PBL SiN barrier formation | Helmut Tews | 2004-01-13 |