Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797636 | Process of fabricating DRAM cells with collar isolation layers | Rolf Weis | 2004-09-28 |
| 6740555 | Semiconductor structures and manufacturing methods | Alexander Michaelis, Stephan Kudelka, Uwe Schroeder, Raj Jammy, Ulrike Gruening | 2004-05-25 |
| 6740595 | Etch process for recessing polysilicon in trench structures | Stephan Kudelka, Alexander Michaelis, Uwe Schroeder, Martin Popp, Kristin Schupke +1 more | 2004-05-25 |
| 6727142 | Orientation independent oxidation of nitrided silicon | Oleg Gluschenkov, Suryanarayan G. Hegde | 2004-04-27 |
| 6723611 | Vertical hard mask | Hiroyuki Akatsu, Oleg Gluschenkov, Porshia S. Parkinson, Ravikumar Ramachandran, Kenneth T. Settlemyer, Jr. | 2004-04-20 |
| 6677197 | High aspect ratio PBL SiN barrier formation | Stephan Kudelka | 2004-01-13 |