Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806200 | Method of improving etch uniformity in deep silicon etching | David M. Dobuzinsky, Rolf Weis, Richard S. Wise | 2004-10-19 |
| 6743727 | Method of etching high aspect ratio openings | Gangadhara S. Mathad, Rajiv Ranade | 2004-06-01 |
| 6709917 | Method to increase the etch rate and depth in high aspect ratio structure | Rajiv Ranade, Gangadhara S. Mathad | 2004-03-23 |
| 6706586 | Method of trench sidewall enhancement | Christophe N. Collins, Rajarao Jammy, Brian W. Messenger | 2004-03-16 |