Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809027 | Self-aligned borderless contacts | Jay William Strane, Hiroyuki Akatsu | 2004-10-26 |
| 6806177 | Method of making self-aligned borderless contacts | Jay William Strane, Hiroyuki Akatsu | 2004-10-19 |
| 6806200 | Method of improving etch uniformity in deep silicon etching | Siddhartha Panda, Rolf Weis, Richard S. Wise | 2004-10-19 |
| 6740539 | Carbon-graded layer for improved adhesion of low-k dielectrics to silicon substrates | Richard A. Conti, Prakash Dev, Daniel C. Edelstein, Gill Yong Lee, Kia-Seng Low +3 more | 2004-05-25 |
| 6740568 | Method to enhance epitaxial regrowth in amorphous silicon contacts | Yun-Yu Wang, Johnathan E. Faltermeier, Colleen Snavely, Michael Maldei, Michael Iwatake +4 more | 2004-05-25 |