Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806200 | Method of improving etch uniformity in deep silicon etching | David M. Dobuzinsky, Siddhartha Panda, Rolf Weis | 2004-10-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806200 | Method of improving etch uniformity in deep silicon etching | David M. Dobuzinsky, Siddhartha Panda, Rolf Weis | 2004-10-19 |