Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835671 | Method of making an integrated circuit using an EUV mask formed by atomic layer deposition | Bich-Yen Nguyen, Dina H. Triyoso | 2004-12-28 |
| 6815129 | Compensation of flare-induced CD changes EUVL | John E. Bjorkholm, Daniel G. Stearns, Eric M. Gullikson, Daniel A. Tichenor | 2004-11-09 |
| 6673520 | Method of making an integrated circuit using a reflective mask | Sang In Han, Pawitter Mangat, James R. Wasson | 2004-01-06 |