Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835671 | Method of making an integrated circuit using an EUV mask formed by atomic layer deposition | Scott D. Hector, Bich-Yen Nguyen | 2004-12-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835671 | Method of making an integrated circuit using an EUV mask formed by atomic layer deposition | Scott D. Hector, Bich-Yen Nguyen | 2004-12-28 |