Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811936 | Structure and process for a pellicle membrane for 157 nanometer lithography | Steven D. Smith | 2004-11-02 |
| 6673520 | Method of making an integrated circuit using a reflective mask | Pawitter Mangat, James R. Wasson, Scott D. Hector | 2004-01-06 |