Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797440 | Method of forming a rim phase shifting mask and using the rim phase shifting mask to form a semiconductor device | Cesar M. Garza, Wei E. Wu, Bernard J. Roman, Kevin J. Nordquist, William J. Dauksher | 2004-09-28 |
| 6749968 | Method for fabricating a thin-membrane stencil mask and method for making a semiconductor device using the same | Joe Mogab, Kenneth Smith, James R. Wasson | 2004-06-15 |
| 6673520 | Method of making an integrated circuit using a reflective mask | Sang In Han, James R. Wasson, Scott D. Hector | 2004-01-06 |