Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797440 | Method of forming a rim phase shifting mask and using the rim phase shifting mask to form a semiconductor device | Cesar M. Garza, Wei E. Wu, Bernard J. Roman, Pawitter Mangat, William J. Dauksher | 2004-09-28 |