Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815129 | Compensation of flare-induced CD changes EUVL | John E. Bjorkholm, Daniel G. Stearns, Daniel A. Tichenor, Scott D. Hector | 2004-11-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815129 | Compensation of flare-induced CD changes EUVL | John E. Bjorkholm, Daniel G. Stearns, Daniel A. Tichenor, Scott D. Hector | 2004-11-09 |