Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821682 | Repair of localized defects in multilayer-coated reticle blanks for extreme ultraviolet lithography | Donald W. Sweeney, Paul B. Mirkarimi | 2004-11-23 |
| 6815129 | Compensation of flare-induced CD changes EUVL | John E. Bjorkholm, Eric M. Gullikson, Daniel A. Tichenor, Scott D. Hector | 2004-11-09 |