Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821682 | Repair of localized defects in multilayer-coated reticle blanks for extreme ultraviolet lithography | Daniel G. Stearns, Donald W. Sweeney | 2004-11-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821682 | Repair of localized defects in multilayer-coated reticle blanks for extreme ultraviolet lithography | Daniel G. Stearns, Donald W. Sweeney | 2004-11-23 |