Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821891 | Atomic layer deposition of copper using a reducing gas and non-fluorinated copper precursors | Mei Chang | 2004-11-23 |
| 6811814 | Method for growing thin films by catalytic enhancement | Wei Cao | 2004-11-02 |
| 6784096 | Methods and apparatus for forming barrier layers in high aspect ratio vias | Fusen Chen, Walter Glenn, Praburam Gopalraja, Jianming Fu | 2004-08-31 |
| 6772072 | Method and apparatus for monitoring solid precursor delivery | Seshadri Ganguli, Vincent Ku, Hua Chung | 2004-08-03 |
| 6744715 | Method for reducing the frequency of burn | — | 2004-06-01 |