Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797340 | Method for depositing refractory metal layers employing sequential deposition techniques | Hongbin Fang, Hyung-Suk Yoon, Ken Kaung Lai, Chi C. Young, James Horng +2 more | 2004-09-28 |
| 6772072 | Method and apparatus for monitoring solid precursor delivery | Seshadri Ganguli, Vincent Ku, Ling Chen | 2004-08-03 |