Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809402 | Reflowable-doped HDP film | Minh Van Ngo, Atul Gupta, Tyagamohan Gottipati, John Caffall | 2004-10-26 |
| 6806165 | Isolation trench fill process | Minh Van Ngo, Mark S. Chang | 2004-10-19 |
| 6803265 | Liner for semiconductor memories and manufacturing method therefor | Minh Van Ngo, Arvind Halliyal, Tazrien Kamal, Hidehiko Shiraiwa, Rinji Sugino +1 more | 2004-10-12 |
| 6784095 | Phosphine treatment of low dielectric constant materials in semiconductor device manufacturing | Suzette K. Pangrle, Minh Van Ngo, Lu You | 2004-08-31 |
| 6756672 | Use of sic for preventing copper contamination of low-k dielectric layers | Lu You, Suzette K. Pangrle | 2004-06-29 |
| 6723634 | Method of forming interconnects with improved barrier layer adhesion | Minh Van Ngo | 2004-04-20 |
| 6713874 | Semiconductor devices with dual nature capping/arc layers on organic-doped silica glass inter-layer dielectrics | Lu You, Minh Van Ngo | 2004-03-30 |
| 6686232 | Ultra low deposition rate PECVD silicon nitride | Minh Van Ngo, Robert A. Huertas, Hieu Pham | 2004-02-03 |
| 6677679 | Use of SiO2/Sin for preventing copper contamination of low-k dielectric layers | Lu You, Fei Wang | 2004-01-13 |