Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656847 | Method for etching silicon nitride selective to titanium silicide | Huan-Just Lin | 2003-12-02 |
| 6624018 | Method of fabricating a DRAM device featuring alternate fin type capacitor structures | Chih-Hsing Yu, Chih-Yang Pai | 2003-09-23 |
| 6620631 | Plasma etch method for forming patterned layer with enhanced critical dimension (CD) control | Hun-Jan Tao, Anthony Yen | 2003-09-16 |
| 6579791 | Method to form dual damascene structure | Yeur-Luen Tu, Min-hwa Chi | 2003-06-17 |
| 6566250 | Method for forming a self aligned capping layer | Yeur-Luen Tu, Chih-Yang Pai | 2003-05-20 |
| 6555442 | Method of forming shallow trench isolation with rounded corner and divot-free by using disposable spacer | Chih-Yang Pai, Chih-Hsing Yu, Yeur-Luen Tu, Min-hwa Chi | 2003-04-29 |
| 6514672 | Dry development process for a bi-layer resist system | Bao-Ju Young, Ying-Ying Wang | 2003-02-04 |