Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670279 | Method of forming shallow trench isolation with rounded corners and divot-free by using in-situ formed spacers | Bi-Ling Chen, Min-hwa Chi | 2003-12-30 |
| 6624018 | Method of fabricating a DRAM device featuring alternate fin type capacitor structures | Chih-Hsing Yu, Chia-Shiung Tsai | 2003-09-23 |
| 6566250 | Method for forming a self aligned capping layer | Yeur-Luen Tu, Chia-Shiung Tsai | 2003-05-20 |
| 6555442 | Method of forming shallow trench isolation with rounded corner and divot-free by using disposable spacer | Chih-Hsing Yu, Yeur-Luen Tu, Chia-Shiung Tsai, Min-hwa Chi | 2003-04-29 |