Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670279 | Method of forming shallow trench isolation with rounded corners and divot-free by using in-situ formed spacers | Chih-Yang Pai, Min-hwa Chi | 2003-12-30 |
| 6565759 | Etching process | Erik S. Jeng, Hao Liu | 2003-05-20 |