Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656847 | Method for etching silicon nitride selective to titanium silicide | Chia-Shiung Tsai | 2003-12-02 |
| 6590344 | Selectively controllable gas feed zones for a plasma reactor | Shun-Jan Tao, Mong-Song Liang | 2003-07-08 |
| 6503848 | Method of forming a smooth polysilicon surface using a soft etch to enlarge the photo lithography window | Bor-Wen Chan, Yuan-Hung Chiu, Hun-Jan Tao | 2003-01-07 |