Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656796 | Multiple etch method for fabricating split gate field effect transistor (FET) device | Bor-Wen Chan, Yu-I Wang, Chen-Yuan Hsu | 2003-12-02 |
| 6630398 | Borderless contact with buffer layer | Ming-Huan Tsai, Jyh-Huei Chen, Chu-Yun Fu | 2003-10-07 |
| 6620631 | Plasma etch method for forming patterned layer with enhanced critical dimension (CD) control | Chia-Shiung Tsai, Anthony Yen | 2003-09-16 |
| 6524938 | Method for gate formation with improved spacer profile control | Yuan-Hung Chiu | 2003-02-25 |
| 6503848 | Method of forming a smooth polysilicon surface using a soft etch to enlarge the photo lithography window | Bor-Wen Chan, Yuan-Hung Chiu, Huan-Just Lin | 2003-01-07 |