Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620631 | Plasma etch method for forming patterned layer with enhanced critical dimension (CD) control | Hun-Jan Tao, Chia-Shiung Tsai | 2003-09-16 |
| 6593033 | Attenuated rim phase shift mask | Zhiliu Ma, Cesar M. Garza | 2003-07-15 |