Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649452 | Method for manufacturing a lithographic reticle for transferring an integrated circuit design to a semiconductor wafer | Kevin Lucas, William L. Wilkinson | 2003-11-18 |
| 6593033 | Attenuated rim phase shift mask | Zhiliu Ma, Anthony Yen | 2003-07-15 |