Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666957 | Magnetron sputtering system and photomask blank production method based on the same | Masataka Watanabe, Hideo Kaneko, Ken Ohashi, Hideki Kobayashi | 2003-12-23 |
| 6641958 | Phase shift mask blank, phase shift mask, and methods of manufacture | Yukio Inazuki, Tamotsu Maruyama, Mikio Kojima, Hideo Kaneko, Masataka Watanabe | 2003-11-04 |
| 6589699 | Photomask blank and photomask | Hideo Kaneko, Yukio Inazuki | 2003-07-08 |
| 6514642 | Phase shift mask and method of manufacture | Tamotsu Maruyama, Yukio Inazuki, Hideo Kaneko, Shinichi Kohno | 2003-02-04 |
| 6511778 | Phase shift mask blank, phase shift mask and method of manufacture | Ichiro Kaneko, Jiro Moriya, Masayuki Suzuki, Tamotsu Maruyama | 2003-01-28 |
| 6503668 | Phase shift mask blank, phase shift mask, and method of manufacture | Yukio Inazuki, Hideo Kaneko, Tamotsu Maruyama | 2003-01-07 |
| 6503669 | Photomask blank, photomask and method of manufacture | Hideo Kaneko, Yukio Inazuki, Tamotsu Maruyama | 2003-01-07 |