Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641958 | Phase shift mask blank, phase shift mask, and methods of manufacture | Yukio Inazuki, Tamotsu Maruyama, Hideo Kaneko, Masataka Watanabe, Satoshi Okazaki | 2003-11-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641958 | Phase shift mask blank, phase shift mask, and methods of manufacture | Yukio Inazuki, Tamotsu Maruyama, Hideo Kaneko, Masataka Watanabe, Satoshi Okazaki | 2003-11-04 |