Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641958 | Phase shift mask blank, phase shift mask, and methods of manufacture | Tamotsu Maruyama, Mikio Kojima, Hideo Kaneko, Masataka Watanabe, Satoshi Okazaki | 2003-11-04 |
| 6589699 | Photomask blank and photomask | Hideo Kaneko, Satoshi Okazaki | 2003-07-08 |
| 6514642 | Phase shift mask and method of manufacture | Satoshi Okazaki, Tamotsu Maruyama, Hideo Kaneko, Shinichi Kohno | 2003-02-04 |
| 6503668 | Phase shift mask blank, phase shift mask, and method of manufacture | Hideo Kaneko, Tamotsu Maruyama, Satoshi Okazaki | 2003-01-07 |
| 6503669 | Photomask blank, photomask and method of manufacture | Hideo Kaneko, Tamotsu Maruyama, Satoshi Okazaki | 2003-01-07 |