Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6514642 | Phase shift mask and method of manufacture | Satoshi Okazaki, Tamotsu Maruyama, Yukio Inazuki, Hideo Kaneko | 2003-02-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6514642 | Phase shift mask and method of manufacture | Satoshi Okazaki, Tamotsu Maruyama, Yukio Inazuki, Hideo Kaneko | 2003-02-04 |