Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666957 | Magnetron sputtering system and photomask blank production method based on the same | Masataka Watanabe, Satoshi Okazaki, Ken Ohashi, Hideki Kobayashi | 2003-12-23 |
| 6641958 | Phase shift mask blank, phase shift mask, and methods of manufacture | Yukio Inazuki, Tamotsu Maruyama, Mikio Kojima, Masataka Watanabe, Satoshi Okazaki | 2003-11-04 |
| 6589699 | Photomask blank and photomask | Yukio Inazuki, Satoshi Okazaki | 2003-07-08 |
| 6514642 | Phase shift mask and method of manufacture | Satoshi Okazaki, Tamotsu Maruyama, Yukio Inazuki, Shinichi Kohno | 2003-02-04 |
| 6503668 | Phase shift mask blank, phase shift mask, and method of manufacture | Yukio Inazuki, Tamotsu Maruyama, Satoshi Okazaki | 2003-01-07 |
| 6503669 | Photomask blank, photomask and method of manufacture | Yukio Inazuki, Tamotsu Maruyama, Satoshi Okazaki | 2003-01-07 |