Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511778 | Phase shift mask blank, phase shift mask and method of manufacture | Satoshi Okazaki, Ichiro Kaneko, Masayuki Suzuki, Tamotsu Maruyama | 2003-01-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511778 | Phase shift mask blank, phase shift mask and method of manufacture | Satoshi Okazaki, Ichiro Kaneko, Masayuki Suzuki, Tamotsu Maruyama | 2003-01-28 |