Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653155 | Integrated circuit devices including a resistor pattern and methods for manufacturing the same | Seok-Jun Won | 2003-11-25 |
| 6624069 | Methods of forming integrated circuit capacitors having doped HSG electrodes | Seung Hwan Lee, Sang-Hyeop Lee, Young Sun Kim, Se-Jin Shim, You-Chan Jin +7 more | 2003-09-23 |
| 6576053 | Method of forming thin film using atomic layer deposition method | Yeong-kwan Kim, Jae-Soon Lim, Sung-Je Choi, Sang In Lee | 2003-06-10 |
| 6555394 | Methods of fabricating capacitors including Ta2O5 layers in a chamber including changing a Ta2O5 layer to heater separation or chamber pressure | Ki-Yeon Park, Heung-Soo Park | 2003-04-29 |