Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576053 | Method of forming thin film using atomic layer deposition method | Yeong-kwan Kim, Young-Wook Park, Jae-Soon Lim, Sung-Je Choi | 2003-06-10 |
| 6570253 | Multi-layer film for a thin film structure and a capacitor using the same | Jae-Soon Lim, Yeong-kwan Kim, Heung-Soo Park | 2003-05-27 |