Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583056 | Storage electrode of a semiconductor memory device and method for fabricating the same | Young-Sub Yu, Seok Sik Kim, Ki-Hyun Hwang, Han-Jin Lim | 2003-06-24 |
| 6576053 | Method of forming thin film using atomic layer deposition method | Yeong-kwan Kim, Young-Wook Park, Jae-Soon Lim, Sang In Lee | 2003-06-10 |
| 6509280 | Method for forming a dielectric layer of a semiconductor device | — | 2003-01-21 |