Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576053 | Method of forming thin film using atomic layer deposition method | Young-Wook Park, Jae-Soon Lim, Sung-Je Choi, Sang In Lee | 2003-06-10 |
| 6570253 | Multi-layer film for a thin film structure and a capacitor using the same | Jae-Soon Lim, Heung-Soo Park, Sang In Lee | 2003-05-27 |
| 6509601 | Semiconductor memory device having capacitor protection layer and method for manufacturing the same | Yong-Tak Lee, Hag-Ju Cho | 2003-01-21 |