Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599807 | Method for manufacturing capacitor of semiconductor device having improved leakage current characteristics | Seung Hwan Lee, Han-Mei Choi, Yun-Jung Lee, Gab-Jin Nam, Ki-Yeon Park +2 more | 2003-07-29 |
| 6576053 | Method of forming thin film using atomic layer deposition method | Yeong-kwan Kim, Young-Wook Park, Sung-Je Choi, Sang In Lee | 2003-06-10 |
| 6570253 | Multi-layer film for a thin film structure and a capacitor using the same | Yeong-kwan Kim, Heung-Soo Park, Sang In Lee | 2003-05-27 |