Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6599807 | Method for manufacturing capacitor of semiconductor device having improved leakage current characteristics | Jae-Soon Lim, Seung Hwan Lee, Han-Mei Choi, Yun-Jung Lee, Gab-Jin Nam +2 more | 2003-07-29 |
| 6555394 | Methods of fabricating capacitors including Ta2O5 layers in a chamber including changing a Ta2O5 layer to heater separation or chamber pressure | Heung-Soo Park, Young-Wook Park | 2003-04-29 |