Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645800 | Method for the production of a field-effect structure | Wilhelm Frey, Klaus Heyers | 2003-11-11 |
| 6592664 | Method and device for epitaxial deposition of atoms or molecules from a reactive gas on a deposition surface of a substrate | Wilhelm Frey, Klaus Heyers | 2003-07-15 |
| 6558559 | Method of manufacturing micromechanical surface structures by vapor-phase etching | Volker Becker, Michael Offenberg, Andrea Schilp | 2003-05-06 |
| 6531031 | Plasma etching installation | Volker Becker, Andrea Schilp, Thomas Beck | 2003-03-11 |
| 6531068 | Method of anisotropic etching of silicon | Andrea Schilp | 2003-03-11 |