Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6655834 | Sensor, in particular thermal sensor, and method for manufacturing a largely self-supporting membrane | Karsten Funk | 2003-12-02 |
| 6648389 | Process for manipulating components, a microtool for implementing the process, and a process for manufacturing the microtool or microtool parts | Karsten Funk | 2003-11-18 |
| 6645800 | Method for the production of a field-effect structure | Franz Laermer, Klaus Heyers | 2003-11-11 |
| 6592664 | Method and device for epitaxial deposition of atoms or molecules from a reactive gas on a deposition surface of a substrate | Franz Laermer, Klaus Heyers | 2003-07-15 |
| 6555443 | Method for production of a thin film and a thin-film solar cell, in particular, on a carrier substrate | Hans Artmann, Manfred Moellendorf | 2003-04-29 |