Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6555443 | Method for production of a thin film and a thin-film solar cell, in particular, on a carrier substrate | Wilhelm Frey, Manfred Moellendorf | 2003-04-29 |
| 6521313 | Method for producing a diaphragm sensor unit and diaphragm sensor unit | Thorsten Pannek | 2003-02-18 |
| 6506621 | Method for producing a diaphragm sensor array and diaphragm sensor array | Thorsten Pannek, Robert Siegel | 2003-01-14 |