Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521313 | Method for producing a diaphragm sensor unit and diaphragm sensor unit | Hans Artmann | 2003-02-18 |
| 6506621 | Method for producing a diaphragm sensor array and diaphragm sensor array | Hans Artmann, Robert Siegel | 2003-01-14 |