Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6558559 | Method of manufacturing micromechanical surface structures by vapor-phase etching | Volker Becker, Franz Laermer, Michael Offenberg | 2003-05-06 |
| 6531031 | Plasma etching installation | Volker Becker, Franz Laermer, Thomas Beck | 2003-03-11 |
| 6531068 | Method of anisotropic etching of silicon | Franz Laermer | 2003-03-11 |
| 6515491 | Structural body having a stochastic surface patterning as well as a capacitive sensor having such a structural body | Michael Kupzig, Karsten Funk | 2003-02-04 |