Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6531031 | Plasma etching installation | Volker Becker, Franz Laermer, Andrea Schilp | 2003-03-11 |
| 6529582 | Focused X-ray scatter reduction grid | Howard Feldmesser, Paul R. Falk, Harry K. Charles, Jr. | 2003-03-04 |