Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6558559 | Method of manufacturing micromechanical surface structures by vapor-phase etching | Franz Laermer, Michael Offenberg, Andrea Schilp | 2003-05-06 |
| 6531031 | Plasma etching installation | Franz Laermer, Andrea Schilp, Thomas Beck | 2003-03-11 |